Twenty Layers Vertical Plasma Equipment
Twenty-Layer Vertical Plasma Equipment allows operators to directly adjust the plasma power output via the HMI (Human-Machine Interface), providing flexible and convenient process optimization. The system adopts PLC intelligent control, enabling fully automatic operation with real-time monitoring, automatic alarm, and recipe management functions.
Function Description
Twenty-Layer Vertical Plasma Equipment allows operators to directly adjust the plasma power output via the HMI (Human-Machine Interface), providing flexible and convenient process optimization. The system adopts PLC intelligent control, enabling fully automatic operation with real-time monitoring, automatic alarm, and recipe management functions. Designed for long-term stability and controllability, the equipment ensures reliable performance even under high-load and extended operation conditions.
Main Components (Configuration)
Programmable Logic Controller (PLC)
Equipped with Mitsubishi Q00UJCPU main controller with Q68ADV expansion module, offering powerful logic processing capability and high stability to guarantee safe and reliable operation.
Plasma Generator
Integrated with ATV's self-developed model ATV-MFPS-10, delivering an output power range of 0–10KW with ±2% continuous adjustability, providing precise and stable energy output for different materials and process requirements.
Main Applications
This system is primarily used for PTFE (Polytetrafluoroethylene) desmear processes. PTFE has exceptional chemical stability and very low surface energy, making it difficult to clean using traditional methods. High-power plasma treatment effectively removes resin residues left after drilling or laser processing, while simultaneously activating the surface. This greatly enhances adhesion and reliability for subsequent processes such as metallization, bonding, coating, and printing.
Technical Specifications
Vacuum Chamber
Dimensions 1000mm × 1170mm × 1490mm with a wall thickness of ≥30mm, manufactured from high-strength alloy materials to ensure excellent vacuum retention and long service life.
Plasma Generator
ATV self-developed ATV-MFPS-10, with power output 0–10KW, precision ±2%, and continuous adjustability. This enables process flexibility across different treatment intensities and durations.
Application Value
The 20-layer vertical plasma equipment provides large-scale processing capacity and flexible power adjustment, making it an ideal solution for advanced PCB manufacturing, semiconductor packaging, new energy materials, and polymer processing industries. Its wide power range allows precise process control, ensuring consistent treatment quality and high yield. With stable operation, low maintenance requirements, and energy-efficient design, this equipment offers both productivity and sustainability. For manufacturers dealing with large-volume, high-precision PTFE substrates, it is not only a core tool for enhancing production efficiency and process capability but also a strategic asset to strengthen competitiveness and market responsiveness.
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